1-Micron Wafer Inspection Microscope Axis Teardown

In this video, we will look at an old wafer-inspection microscope axis, which likely has an accuracy better than 1 micron.
The axis has an interesting mechanism to increase it's precision. which could be implemented in larger CNC machines.
I was over 90 degrees when I shot this, so please, go easy on me.
I am sorry about the production values, but I am in the process of moving, and it's not good.
This is one of many channels demonetized by youtube. If you found this video, it's likely not from anything that youtube did.
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Thank you, and Thank you by Darla for the Axis!
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[@gregreynolds5686]

Fascinating analysis - many thanks for taking the time to do it so well.

[@ijustwanttogosailing8248]

Interesting explanation about little finger, I always thought that it's because calluses on little fingers are less thick and therefore these fingers tend to be more sensitive..

[@BrendaEM]

Could be also.

[@spehropefhany]

Very nice, B., thanks very much for the dissection and explanation of the plate/ball bearing nut alignment mechanism. Very interesting. I guess I was expecting flexures. The shaft looks a lot like a micrometer thread. BTW, I'm sure you know, and it was hot, but just to nitpick, it's "Belleville washer". I think Bellevue was an insane asylum or something. 8-)

[@BrendaEM]

I had a problem remembering the name of them until I figured out a "crazy" way to remember them. : )

[@visualchallenge2413]

Apart from the good content, your videos have pleasing colors and background textures ( the intro also is well designed and unique) !

[@BrendaEM]

Thank you. I am doing this on a shoestring. I need a better camera, a good background, and well, soon, someplace to shoot my videos. Oddly enough, the look of my banner looks very much like and early encyclopedia called a "cyclopedia" en.wikipedia.org/wiki/Cyclop%C3%A6dia,_or_an_Universal_Dictionary_of_Arts_and_Sciences

[@sweetpotatox1007]

Discovered ya today, keep these geeky vids coming! 🍉

[@BrendaEM]

Tryin'

[@jeromeprater183]

This linear slide was made by Klinger Micro-Control in France. Newport purchased the company a number of years ago.

[@BrendaEM]

You nailed it! Thanks! It might be a Klinger Scientific MT160-200 or MC42468. The newer series is UT.

[@nathanwoodruff9422]

You do know that if you have a 10 lead 5 phase stepper motor that has 1000 steps per revolution, it will microstep at 10,000 steps per revolution. Come to think about it now that I have watched more of the video I have made that very motor microstep at 10,000 steps per revolution. I made my own controller though to make it happen.

[@BrendaEM]

I never got into the nitty gritty with the motors, because I have a few harmonic drives. Oddly, the 5 phase drivers were 2x microstepping only. Even then many of the motors had photo-inturupper sensors so the equipment could run closed loop. The motor I used was from wafer handling equipment.

[@drakonzebra]

What would you use this for?

[@BrendaEM]

Recently, I used it for an optical experiment, as shown in a previous video. Originally, I wanted to make a fine milling machine from it, you know, for making other fine milled parts. Though, the leadnuts won't last forever, and without also having a good lathe, I can't make any more. The 2 axises exist in a strange area because they are made heavier and stronger than most optical stages, but lighter than most CNC's. It I make a CNC from it, it will be like a Seig X2, but a...little finer.