Dry Etch TPT Training Introduction to wafer loading and temperature controller

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DTU Nanolab

DTU Nanolab

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This video shows the operation of one of our plasma etchers. Here you can see the loading of wafers, how to operate the temperature controls on our two old systems and how to mount a whole box of wafers in the cassette loading system (MACS) on our Deep Reactive Ion (DRIE) Pegasus 1 tool.

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