[Electronics] FIB-SEM tomography of a CMOS image sensor

533 serial cross-sectional BSE images of a CMOS image sensor were automatically acquired on a FIB-SEM in 14 hours. Reconstructed 3D data visualizes the arrangement of electrodes and wiring. Slice images gave layer descriptions of the color filter, the plugs with a diameter of about 200 nm, and the metal wiring with the minimum width of approximately 150 nm respectively.
#CMOS #ColorFilter #3D #FIBSEM #electronmicroscopy #ElectronMicroscope
Available instruments for this measurement are :
FIB-SEM
www.hitachi-hightech.com/glob...
Further details can be found on our membership website with data library. Looking forward to your joining.
biz.hitachi-hightech.com/sina...
About our membership site, see www.hitachi-hightech.com/glob...