老師對Supercritical fluid treatment eg. SCF Nitridation on GaN HEMT 怎麼看 低溫高穿透性得特性有點像是HPSP那台機台for CMOS
@王不老說半导Ай бұрын
Looks like fancy games people play to get publication. Industry does not like them due to cost and no guarantee that the benefit are still there after all the steps are done.. GaN Dit are so hard to passivate, as explained in the video. I simply won't trust these fancy SC (they tried to get themselves into Si-CMOS process flow and failed)