E-Beam Lithography, Part 1

E-beam lithography is the process of directing an electron beam across a resist layer and thereby creating a pattern that can be etched. Structures of 20nm can be produced. This is the technique that is often used to create nano scale waveguides and microring resonators. One type uses an scanning electron microscope equipped with special beam control software. The other far more expensive method is a dedicated e-beam facility that is able to etch structures directly.
This video is part 1 of a 3-part series.
More information on CMDITR's wiki:
depts.washingto...

[@ilyas7867]

Each video is amazing and instructive! Thank you so much.

[@cagriuzum862]

This is really helpful, thanks.

[@jacky2500]

Excellent tutorial for beginners.

[@泠然御風]

the clean process is so inpropriated

[@ilyas7867]

Like your videos so much. Very helpful.

[@cosanostra8341]

thank you very much for the video. Could you please tell me what are the reasons of the apparance of the stitching lines und why some lithography machine cause this problem and other dont cause this problem?? thank you!

[@sabirtypist14]

Excellent tutorial

[@sekhantsolara6909]

Informative indeed. Thanks!

[@Januswizard]

Also, your PMMA is probably dissolve in anisole, which is not good for your body. You should conduct all your spin coating in your fume hood, and safety glasses on!

[@SanchitPEE]

amazing lecture.. grattitutde

[@2sudonim]

Very informative.

[@absolute___zero]

great stuff! I want to build my own e-beam lithography machine , where can I find sketches on how it works?

[@oiytd5wugho]

You build a scanning electron microscope with an unfocused beam and hook the defelction coils up to a custom analog cnc controller. Like, really, finding diagrams is the easiest part, try looking at research papers paper on the topic, that's always a good place to start. This would be a humongous undertaking to build if you don't already own a working microscope

[@rock3tcatU233]

Awesome stuff.

[@junaidamjad5991]

i want to have some plasmonic nanostructures using e beam lithography. is their any university/institute which can produce them on payment ?? guide please.

[@Jkauppa]

why they still use uv light? because they are still in solid state transistors, micromechanical relays go to pico sizes

[@Jkauppa]

cd-burn, also you can do e-beam mask

[@alisawang5947]

There is another E-beam application .@eVtQ

[@shonaoneill5151]

Very interesting

[@breakfastenjoyer]

do you know if PPC is used as a 'resist'

[@kremesti]

good video

[@SercanPy]

Why do you specifically use pure nitrogen to blow excess water off the surface? What's special about nitrogen in this case?

[@Sm4o]

+Sercan 't Nitrogen is in 78% in our atmosphere. It is also the seventh most common element in the Universe. It is an inert element when oxidation is undesirable, i.e. it doesn't react much with matter, thus it is very safe to blow the wafer with it. The reason for using "pure" one now is clearer, since if not, you might get some other elements that does react with the wafer.

[@SercanPy]

Thank you both for taking the time to answer.

[@EZHD]

Where are your safety glasses?

[@泠然御風]

the cutting can cause dust, bad for eB L

[@Januswizard]

We never break wafer like this......man......always scratch the back and break from the front, so you won't damage the front surface.

[@NoReplyAsset]

5:48 :0

[@ЮжныйКот-м2э]

Красивый момент

[@sabirtypist14]

UMW