Рет қаралды 67,809
Carlos gives you an introduction to Photolithography in the cleanroom of the Integrated Nanosystems Research Facility at UC Irvine.
View the SOP documentation for the Laurell Photoresist Spinner
www.inrf.uci.ed...
To skip to any portion of this video, refer to the below chapters:
0:00:12 - Introduction
0:01:21 - Laurel Spinner: Logging in and pre-use examination
0:05:33 - Laurel Spinner: Loading a sample
0:08:59 - Laurel Spinner: Programming the spin speeds and running the tool
0:11:51 - Laurel Spinner: Unloading and baking
0:14:10 - Laurel Spinner: Clean up after processing
0:18:42 - Post spinning procedures
0:19:13 - Development of Su-8
0:22:20 - Disposal of waste