Etch Processes for Microsystems Fabrication - Part II

[@heyarno]

Thanks a lot, this presentation is very intuitive. Now I feel comfortable to try to make a microchannel plate at home. I had no idea how to make a deep funnel shape with wet etching. Now I know dry etching is the way to go.

[@07gurumech]

I found all your basic videos on Microsystem comprehensive and quite easy to understand the concepts. However, you could have explained the physics and chemistry behind the plasma generation, chemical reactions involved in different etch processes etc. Thank you for merging a colossal of material into less than half an hour long videos.

[@pisangsedapable]

Any specific reason why the V-groove is 54.7 deg during wet anisotropic etching?

[@evahelena86]

So helpful presentation. Thank you very much for spreading the knowledge

[@jacobhammerle9751]

At the end 13:18 you are showing an SEM image of an example of DRIE with aspect ratios of 50:1 What kind of process is that? Is it Bosch?

[@matthiaspleil1314]

Jacob Hämmerle The process used to make the leaf springs in this image was most likely the Bosch process.

[@haemse]

Thx

[@AbdulRahman-ju8li]

Thank you, very clear explanation in this video! :)

[@memsuniverse]

great explanation

[@abhiparikh24]

wow! that was really helpful :D thanks SCME

[@fercarcas]

are you accepting PD (pos-doctoral) applications? where to find more?

[@bowu2094]

This is very helpful, thx

[@memsuniverse]

Thanks very much,

[@rock3tcatU233]

Thank you

[@BigArea_Bae]

So So helpful

[@宝宝-n8q]

Thanks very much, Now I know I a DMD is made.

[@scottscheers2118]

I love you so much.