Tricks in Lithography : Part 1 (Immersion Lithography)

Resolution Enhancement Techniques : Part 1
Immersion Lithography

[@cosanostra8341]

thank you v much for the video!! can please tell me how can DOF increased with increasing the NA? DOF=λ/NA*2

[@himura128]

it starts with saying "last few videos". which videos?

[@klaasbernd]

Yess, but why??? I see so many presentation that just slap the formula for NA on the screen and state, see bigger NA, so more light, because that's the definition of NA, so smaller features. Noone seems to actually explain what happens with the light.

[@jhk8902]

What is the Lambda(λ) of the sin(theta)? Is it the wavelength of the source light?

[@afakethrum]

How do you increase DOF for a given resolution by increasing the NA? DOF is inversely proportional to the square of NA.

[@affablelochan]

Wonderful introduction.