PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html
@susmitaganguly17605 жыл бұрын
The lectures are so good. By the meantime I got some questions: 1. Why you don't want H in the RIE process? 2. What causes etched features at one edge of the wafer to have higher etch rates? 3. What causes the overall wafer-scale etch rate variation pattern observed in wafers?