Lecture 36 (CHE 323) Etch, part 3

[@peterpaul9320]

Greatings from Germany. I like how you made a cliff hanger in part 2 ;). Great series. Thanks for making this content public

[@francescourbani966]

Not sure which video to comment -- just wanted to express my appreciation towards this whole series/playlist, it's amazingly done, congratulation!!

[@estilomaniaco]

I love your lectures! Thank you very much

[@ChrisMack]

PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html

[@NaveenShettyind]

good information and explanation..

[@susmitaganguly1760]

The lectures are so good. By the meantime I got some questions: 1. Why you don't want H in the RIE process? 2. What causes etched features at one edge of the wafer to have higher etch rates? 3. What causes the overall wafer-scale etch rate variation pattern observed in wafers?

[@bhoopendrakushwaha7967]

Very good explanations