Drift compensation in SEM

Scanning Electron Microscope (SEM) image acquisition is mostly affected by the time varying motion of pixel positions in the consecutive images, a phenomenon called drift. In order to perform accurate measurements using SEM, it is necessary to compensate this drift in advance. Most of the existing drift compensation methods
were developed using the image correlation technique. In this video, we present an image registration-based drift compensation method, where the correction on the distorted image is performed by computing the homography, using the keypoint correspondences between the images.