Pump Recirculation: Dip Tubes and Dispense Heads - CMP Slurry Technical Video Series

This CMP technical video series features best practices and techniques for homogenization of CMP slurry using pump recirculation. One of the most important steps in handling slurry for CMP applications is to ensure that the slurry, which is a mixture of chemical and abrasive components, is well-mixed and homogeneous before it is introduced into the slurry distribution system. This can eliminate many potential problems in the CMP process.