How Extreme Ultraviolet Lithography works | Part 1/3

[@carterbeals9771]

It blows me away that you're providing content of this quality and detail to us for free. Very fascinating technology. Thank you for making this series!

[@alexandersundukov3196]

01:20 Resolution Formula 02:23 Lithography Roadmap 05:45 Professor Kinoshita 08:39 ELT M2 09:28 Micro Exposure Tool 13:00 Alpha Demo Tool 16:32 Starlith 3100

[@tamasmihaly1]

Thank you, ZEISS! Amazing time to be alive.

[@alirobe]

I really like how this is put together. Very well explained, and using history to build upon concepts with clarity and concision. EUV is set to be a defining technology for the 2020s, and will allow so much human development. Thank you for sharing, and thank you to everyone who is working in this critical area. :)

[@Geogrn]

t blows me away that you're providing content of this quality and detail to us for free. Very fascinating technology.

[@brandonbajc2084]

I use your lens wipes to clean my glasses, phone, watch and just about everything, had no idea zeiss was involved in semiconductor lithography!

[@Rahul-tg9gj]

Excellent review. May the light be with you always, Zeiss😀.

[@VicenteSchmitt]

I've been looking for this kind of content for a while, this is incredible!

[@ishwarabhat]

Unbelievable level of competency , commitment and the details. Thanks a lot for great video.

[@CharlesVanNoland]

Holy cow, if the mirrors only reflect 70% of the EUV that means that 70% ^ 12 mirrors = ~1.5% of the generated EUV actually makes it to the etch!

[@RoySATX]

When I was a child I looked in awe at the vacuum tubes and hand drawn lead traces within the tech of the time. Today that tech seems childsplay, and our current tech is looked upon as commonplace, we seldom take the time to consider or appreciate the wonders around us. Our genius is our ability to see and manipulate the world around us, but we must be careful not to assume our genius is replacement for wonder and awe. We still understand so very little, I am in awe of what we have learned, I am in wonder of what we are to learn. “The most beautiful thing we can experience is the mysterious. It is the source of all true art and science. He to whom the emotion is a stranger, who can no longer pause to wonder and stand wrapped in awe, is as good as dead -his eyes are closed" ~ Albert Einstein

[@JathavanSriram]

Thank you Zeiss for this great video! I work in Cloud Technology and started to read up on EUV Lithography.

[@klutxzs]

Thank you Dr. Sascha really appreciate your explanation for this EUV video series. I understand it really well.

[@pjoh7]

Great series!

[@gasun1274]

this has been very useful for my presentation project. all other materials online are made either by scientifically illiterate journos or researchers who put incomprehensible excerpts from research papers

[@LHFX]

This is a amazing. My next lens will be zeiss even if it's a crappy one :) Thank you!

[@sto2779]

Exactly, how is this complex reticle (Mask) made? There should be a video too alone just about the making of the mask.

[@zeissgroup]

Thanks for your question. We talked to our Semiconductor Manufacturing experts about it: Photomasks used in optical lithography are not manufactured by ZEISS, but by mask shops. You can find more information on the manufacturing of photomasks here: www.halbleiter.org/en/photolithography/photomasks/#:~:text=%20Photomask%20manufacture%20%201%20First%20step%20is,to%20prevent%20contamination%20of%20the%20glass%2Fchrome%20More%20. ZEISS Semiconductor Mask Solutions (SMS) provides several solutions enabling the manufacturing of defect-free photomasks meeting tightest specifications. SMS develops systems that analyze and repair defects on the photomask and measure and optimize specific mask properties. Detecting and correcting possible defects on the mask is so important because errors would be transferred to the wafers and the chips would thus be unusable. Faultless exposure therefore saves a lot of time and money. Learn more about ZEISS photomask solutions here: www.zeiss.com/semiconductor-manufacturing-technology/products-solutions/photomask-solutions.html

[@alfong8279]

Excellent reporting and analysis, thanks!

[@ayrendraganas8686]

Thank you for sharing knowledge!

[@maximliu]

Great tutorial, thanks for putting everything together! @Zeiss

[@paxundpeace9970]

More then 25 years in the making that is massiv.

[@tiavor]

how much interferometry is involved in EUV, beside surface grading?

[@gerhardbraun3912]

Great presentation!

[@helmutzollner5496]

Very impressive. Thank you for sharing!

[@miamatti]

Bravo zeiss!

[@vallotubli]

The research, science, collaboration with mechatronics, coordination, dedication for a single outcome of producing chips is a miracle. And the selfie making chicks have no clue...

[@trumpyla]

Wow, thank you!

[@davidwilkie9551]

Ultra tech, love it

[@thomasciarlariello3228]

impressive

[@ErikS-]

So EUV was invented in Japan, but it was not Nikon or Canon that got the contract to develop EUV... Instead it was a Dutch company.

[@Parkskiingftw]

Can you talk about the non minimum phase response of the tin droplets and how that affects the laser pulse timings? I am just graduating EE right now and man it would be a dream to work on machines like this.

[@zeissgroup]

Thanks for your interest. ZEISS develops and produces the optical system for the EUV lithography machine. The high-performance laser amplifier is delivered by TRUMPF. So your question relates to their field of expertise. You can find more information about the laser system on the TRUMPF website: www.trumpf.com/en_INT/

[@atown4736]

The tin and laser pulse timings all come together inside ASML's EUV machine. That is where the magic happens. I am an engineer working at ASML and on this machine. We are always hiring at ASML, check out the company job postings. Good luck!

[@Parkskiingftw]

@@atown4736 I am definately going to be sending in an application soon enough. I am graduating electrical with a computer science minor. Most of my 4rth year courses are controls related with one optics class for my own interests. I am also a member of my uni's aerospace club where I am designing a six degree of freedom thrust vector control system for our rocket. Knowing all of this do you think I will still be considered despite the fact that I am Canadian and don't specifically have a degree in controls?

[@atown4736]

@@Parkskiingftw Honestly that all sounds great. The optics background is key as there are hundreds of mirrors in the ASML machine. We have one that costs over a million USD alone! We are an international company of 20,000. Offices all over the world. Great opportunity to travel if you'd like that as well!

[@Parkskiingftw]

@@atown4736 Wow that must be one smooth mirror with some crazy material properties. Sounds like a pretty sweet gig, hopefully I can find a position at ASML!

[@PimpoDiabolo]

Thanks!

[@andreasbauer3508]

when may I buy a PC with euv chips...?!

[@zeissgroup]

Hello Andreas, thanks for your question. The market launch of EUV technology was a huge success: Apple's EUV chip M1, is already built into the current Mac Book (Air & Pro), which was launched in November 2020. EUV microchips are also built into the latest smartphones today - from Apple (iPhone12) to Samsung (Galaxy Note 10+ and Galaxy S21). These chips are manufactured using 5-nanometer production technology.

[@marvin19966]

this is ridiculously german love it

[@shonithraj5383]

what does intermediate focus mean? Can anyone please let me know :)

[@izaakkemp8938]

Great content, just another order of magnitude to go and we will be building chips atom by atom.

[@paulmichaelfreedman8334]

That won't be happening, at least not with lithography. And chips with less than a certain number of atoms in the components of the transistors, will not work because of quantum effects, namely quantum tunneling of the electrons across the gate if it gets too small.

[@izaakkemp8938]

@@paulmichaelfreedman8334 That seems rather short sighted. There is no physical limitation to the size achievable by photolithography other than the wavelength of light used and the atomic size of the imprinted material. Similarly, there are plenty of proposed methods to build smaller gates even with the limitations imposed by tunneling (destructive quantum interference being one example). Seems like every five years people declare Moore's Law to be dead, only for it to continue. Suggest you read the lecture "there's plenty of room at the bottom" by Richard Feynman

[@paulmichaelfreedman8334]

@@izaakkemp8938 Nevertheless, the hurdles will be even more challenging. These EUV lithography machines probably present the limit of human knowledge already. I think it's unlikely we will ever see a single atom gate - ever. Even with quantum effects miti-GATED. Pardon the pun.

[@izaakkemp8938]

@@paulmichaelfreedman8334 That gave me a good laugh. I doubt EUV will represent the cutting edge for 5 more years. But hey, I have this comment saved so I will come back in 2028 and we will see.

[@paulmichaelfreedman8334]

@@izaakkemp8938 Sure thing bud. Hard to predict anyways.

[@robertroberto4749]

Chinese scientists downloaded this video and now trying to do the reverse engineering:).

[@yongjj9348]

You have downloaded a chinese culture over the 1800 years.

[@robertroberto4749]

@@yongjj9348 Please, don't cry, it is called humor.

[@EsonaEsonder]

@@robertroberto4749lol😂😂😂

[@scienceoftheuniverse9155]

Useless. Aren't you ashamed of yourself while you're 100% dependent on the Chinese technology

[@o2807]

chinese like children lol

[@brooks274]

Calling EUV "light" is a subject of debate, some consider it to be more of a soft x-ray.

[@re0420]

Physics ❤

[@akashverma5756]

China is watching these videos seriously to make their own machine.

[@josephmartin1543]

Thanks ! Great introduction, the opposite of the attitude of other manufacturing groups in Asia with a very militant , negative and hateful attitude . It's Democracy against tyrannical dictatorship and one party communist rule. Hope all the Youth understand the differences. Sorry for bringing this political point to a very important scientific technology.

[@maciej12345678]

why you alredy dont go in x-rays

[@kazedcat]

X-ray have back scatter issue.

[@_o_]

don't read the closed captions, they won't help.

[@4TUN3]

His accent is so bad even the algorithm thinks it's in german. :D:D:D

[@JD-kf2ki]

I'm astounded that EUV, LLC. is not even mentioned in this video. Looks like they've been compromised.

[@JigilJigil]

True, it seems they prefer to say a version of story in which just a few European companies did it by their own.

[@Axelvad]

Hello China!

[@Hacimoto]

Long live the german english accent 😂

[@Alex1611AD]

Hello, nerd!

[@brenthepworth8858]

Closed captioning is in a foreign language; and, I cannot understand this gentleman.

[@zeissgroup]

Dear Brent, you can switch you're preferred language for the subtitles in the settings.

[@andynewen]

@@zeissgroup mine is English but subs are still in German 😂😂😂

[@OMNIDROID2995]

Schade dass die deutsche Muttersprache von Dr. Sascha Migura hier sofort heraus zu hören ist, es aber von diesen 3 Videos keine deutsche Version gibt. Für mich selbst reichts. Ich lerne etwas dazu und hab bei der Aussprache was zum schmunzeln. Allerdings haben viele Jugendiche die sowieso schon vom allgemein miserablen Schulsystem deutschlands gebeutelt sind von diesem Video nichts. So bekommt man dann auch keine Kinder/Jugendliche dazu sich mit Technologie, Mathematik und Fremdsprachen zu befassen. Durch so etwas haben wir im Prinzip (Nicht alle aber viele) Commerz und Affen Rap liebende Jugendliche/Kinder die teilweise nur etwas intelligenter sind als manche Primaten. Dazu dann noch so alte, verbitterte Menschen an Führungspositionen und in der Politik die ein völlig veraltetes Weltbild haben. Da wundert es mich gar nicht das wir in Sachen Netzinfrastruktur immer auf den letzten Plätzen der EU stehen und sich hier einfach nichts wirklich weiter entwickelt (Und wenn doch, dann manchmal viel zu langsam). Die meisten hauen nach dem Master dann auch ins Ausland ab weil's denen hier zu doof wird. Wenn das hier so weitergeht sehe ich Schwarz für DE. Aber das Video ist trotzdem gut. Eine deutsche Version für z.B. Oberstufenzentren oder andere Einrichtungen + Interessierte Hobbyisten ohne Englischkenntnisse würde das ganze perfekt abrunden.

[@zeissgroup]

Danke für den Kommentar. Das Video wurde anlässlich der ZEISS Autumn School mit internationalen Teilnehmern und daher auf Englisch aufgenommen. Über die Untertitelfunktion kann das Video aber auch in anderen Sprachen angeschaut werden. Viele Grüße, ZEISS Group Social Media Team

[@kentheengineer592]

Lol the voice reminds me of a stereo type