Lecture 35 (CHE 323) Etch, part 2

  Рет қаралды 16,790

Chris Mack

Chris Mack

Күн бұрын

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@hiraagarwal3788
@hiraagarwal3788 7 жыл бұрын
Very useful Playlist.Thanks Chris.
@printemp8
@printemp8 2 ай бұрын
What a cliffhanger!
@ChrisMack
@ChrisMack 10 жыл бұрын
PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html
@susmitaganguly1760
@susmitaganguly1760 5 жыл бұрын
The lectures are so good. By the meantime I got some questions: 1. Why you don't want H in the RIE process? 2. What causes etched features at one edge of the wafer to have higher etch rates? 3. What causes the overall wafer-scale etch rate variation pattern observed in wafers?
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