Lecture 18 (CHE 323) Ion Implantation, part 3

[@rkpetry]

*_...there are also slot-channels after tilting 7°-so the azimuthal angle should be off-aligned too e.g. NNNW [_**_00:18_**_]..._*

[@cy-ti8ln]

Thank you professor for great contributions to explicit explanations

[@deeppan123]

Thank you, Mr. Chris Mack.

[@ChrisMack]

PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html

[@Jarrod_C]

There is an open area at the end for the pmos, it is allowing the implant to get through? Why is this, why didnt you address this? Why is it not covered?

[@Jarrod_C]

What is a higher Z mask?

[@ChrisMack]

Z stands for the atomic number of the material.