Lecture 17 (CHE 323) Ion Implantation, part 2

[@ChrisMack]

PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html

[@net5966]

can any one give me a copy of the course pdf? the link Chris gave is not available

[@Jarrod_C]

It would be nice to know how you fit the gaussian to the distribution. that part was unclear

[@ChrisMack]

Standard regression fitting can be used. I have another online class on that topic! You can find my course "From Data to Decisions" here: www.lithoguru.com/scientist/statistics/

[@parnavidi3078]

when ions enter solid then the sample would be charged or neutral?

[@ChrisMack]

par navidi Good question. To prevent the sample from becoming charged, the sample is mounted on a grounded sample holder (wafer chuck). Thus, electrons are supplied through the bottom of the wafer (sample) to keep the wafer neutral. In fact, we measure the current flow from the chuck to the wafer as a measure of ion dose delivered.

[@sumitverma5315]

Sir, iam working on SRIM software . Can you refer any book or pdf, how to perform the simulations related to ion implantation?

[@chrismack783]

I recommend looking up the work of Al F. Tasch, for example: www.researchgate.net/scientific-contributions/2120816136_Al_F_Tasch

[@زهراءعيسىمحمد-ظ1ل]

Define the straggle and transverse straggle please dr

[@ChrisMack]

See the video at 11:30 - 12:30.

[@henry6778]

For problem 2 of Homework 5, why do we have square root of 2In(10) after taking log of both sides? It seems like i'm missing something because from my calculations it should be square root of 2In(0.1)