Lecture 11 (CHE 323) Thermal Oxidation, part 2

[@ChrisMack]

PDF copies of all the slides in this course are available at: www.lithoguru.com/scientist/CHE323/course.html

[@aysegulunrotarehberi]

thank you so much, i passed the class and got the highest grade in my class!

[@dvillalva21]

WOW, amazing content! Way better than my professor.

[@kitten_with_bad_breath]

Thanks for the knowledge transfer!

[@vyomeshaudichya4204]

thankyou sir,.. life saving video .. well explained..

[@dylanchiang6940]

thank you so much!! but, where is the explanation of dry oxidation? you said it would be mentioned in this lecture.

[@ChrisMack]

See Lecture 12.

[@첼시아브람]

Can I know why the result is Jss=(H•ks•Pg)/(1+ks/h+kstox/D) ? it's in 13:36

[@myung-giji1409]

THANK YOU FOR YOUR LECTURE! :D

[@ssr0705]

What is 'to' in the equation of tau ?

[@ChrisMack]

It is the initial oxide thickness - the amount of oxide on the wafer before you start this thermal oxidation cycle. If you start with a bare silicon wafer, then t0 is zero. There is more on this topic in part 3 (the next lecture).

[@MarielleChatton]

thank you!

[@jiva1157]

I copied this in my class presentation and it didn't go well.